OLS5100 Microscope
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OLS5100 MICROSCOPE
 
TBB Global Technology Co., Ltd. is the exclusive distributor for Olympus microscopes in Vietnam, pleased to bring genuine and quality OSL5100 Microscopes.
 

 
♦ Technical Specifications
 




Model


OLS5100-SAF


OLS5100-SMF


OLS5100-LAF


OLS5100-EAF




Total magnification


54x - 17,280x




Field of view


16 μm - 5,120 μm




Measurement principle


Optical system


Reflection-type confocal laser scanning laser microscope
Reflection-type confocal laser scanning laser-DIC microscope
Color
Color-DIC




 


 
Light receiving element


Laser: Photomultiplier (2ch)
Color: CMOS color camera




Height measurement


Display resolution


0.5 nm




 


Dynamic range


16 bits




 


Repeatability n-1 *1 *2 *6


5X : 0.45 μm, 10X : 0.1 μm, 20X : 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm




 


Accuracy *1 *3 *6


0.15 + L/100 μm (L: Measuring length [μm])




 


Accuracy for stitched image *1 *4 *6


10X : 5.0+L/100 μm, 20X or higher : 1.0+L/100 μm (L: Stitching length [μm])




 


Measurement noise
(Sq noise) *1 *5 *6


1 nm [Typ]




Width measurement


Display resolution


1 nm




 


Repeatability 3 n-1 *1 *6


5X : 0.4 μm, 10X : 0.2 μm, 20x : 0.05 μm, 50X : 0.04 μm, 100X : 0.02 μm




 


Accuracy *1 *3 *6


Measurement value +/- 1.5%




 


Accuracy for stitched image *1 *3 *6


10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm (L: Stitching length [mm])




Maximum number of measuring points in a single measurement


 
4096 x 4096 pix




Maximum number of measuring points


36 Mpix




XY stage configuration


Length measurement module





NA


NA







 


 
Operating range


100 x 100 mm
Motorized


100 x 100 mm
Manual


300 x 300 mm
Motorized


100 x 100 mm
Motorized




Maximum sample height


100 mm


30 mm


37 mm


210 mm




Laser light source


Wavelength


405 nm




 


Maximum output


0.95 mW




 


Laser class


Class 2 (IEC60825-1:2007, IEC60825-1:2014)




Color light source


White LED





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